JEOL produces high precision instruments designed to prepare samples prior to imaging or analysis with the SEM or TEM or EPMA. From Focused Ion Beam (FIB) systems for nanometric specimens, to a benchtop cross section polisher for large area samples, we offer a selection of specialized instruments to quickly prepare precise cross sections of semiconductor devices, metals, ceramics, and multi-layer structures.
For coating of non-conductive samples and forming carbon and various metal-deposited films, we offer an extremely clean vacuum evaporator. These and other peripheral equipment complement JEOL’s comprehensive line of electron microscopes.
SEM Sample Prep
- Cross Section Polisher: easy-to-use, sample preparation device for SEM, EPMA, and SAM applications
- Smart Coater: simple-to-use sputter coater with fully automated vacuum and sputtering
TEM, SEM and EPMA Sample Prep
- Vacuum Evaporator: clean, oil-free, automatic evacuation system for both metal and carbon coating of samples
- Multi beam FIB for 3D viewing and analysis and sample preparation