Axis Stroke X, Y, Z (mm) : 200 X 200 X 200 DC motorized axes Flatness 2nm/mm local, +/- 2μm form corrected Max. speed: up to 30 mm/s Options: 0,1 μm encoder, 4th axis (rotary, linear) Sensors Several kind of sensors are available Contact : inductive stylus with diamond end, microforce stylus Non contact: […]
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