EL-FLOW Select
Lab-style Mass Flow Meter/Controller for gases

The EL-FLOW series has consistently been our most popular gas flow device over the years, known for its reliability and wide range of flow rates and pressure ratings. If you need a versatile instrument for clean and dry gases, the EL-FLOW Select is your instrument of choice. The series includes metal-sealed instruments for the semiconductor market and other high-purity gas applications, as well as instruments for low pressure drop or corrosive gases. For an industrial version, consider the IN-FLOW series.

EL-FLOW Select including Metal Sealed and LOW-ΔP-FLOW

Lab-style mass flow instruments for clean and dry gases. Optionally available are metal-sealed instruments for the semiconductor market and other high-purity gas applications.

Technical Specifications

• Types of Media – Gases
• Flow Measuring Principle – Thermal
• Series Range – For 0.014 mln/min – 1670 ln/min
• Accuracy – ±0.5% Rd plus ±0.1%FS
• Repeatability – <±0.2% Rd (or <±0.04% FS whichever is greater)
• Max. Pressure bar(g) – 400
• Operating Temperature – -10…+70°C
• Ingress Protection – IP40

Where is the EL-FLOW Select used?

• Flow and pressure controllers for chemical reactor systems
• Gas supply in steelmaking process
• Evaporation device for humidification of fuel cells
• Flow controllers in lithium-ion battery anode manufacturing
• Ultrasonic flow meter for thermal spraying
• Flow controllers for diamond production (CVD diamonds)