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MEMS Dynamic Inclinometers

Accurate measurement of the degree of tilt or inclination from a horizontal position is very important for many motion control systems or to ensure safety. Inclination sensors offer an easy and efficient way of monitoring spatial orientation without the need for mechanical linkages – a real advantage for design engineers. High Accuracy of 0.1° and […]

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Accurate measurement of the degree of tilt or inclination
from a horizontal position is very important for many motion control
systems or to ensure safety. Inclination sensors offer an easy and
efficient way of monitoring spatial orientation without the need for
mechanical linkages – a real advantage for design engineers.

  • High Accuracy of 0.1° and Resolution of 0.01°
  • Measurement Range ±80° (Dual Axis) or 360° (Single Axis)

TILTIX Inclinometers are based on highly dynamic MEMS (micro-Electro-mechanical Systems) technology or on high precision fluid cell technology.

MEMS
In MEMS devices, a ‘micro mass’ is suspended in a flexible support structure. Any movement will induce a displacement of the mass, resulting in a change of capacitance between the mass and the supporting structure. Changes of inclination (tilt) are calculated from the changes in measured capacitance. These inclinometers have a measurement range of ±80° in two axes or 360° in one axis. The devices can withstand shock and vibration loadings of up to 100 g, as per EN 60068-2-27.

Fluid Cell
In fluid filled inclinometers, the sensor cell is partially filled with an electrolytic liquid while the walls are covered with a pair of electrodes. As the sensor tilts, the level of fluid covering the electrodes changes. This results in an increase or decrease in the conductivity between the electrodes. The degree of tilt can be calculated from this measurement. Fluid cell inclinometers are capable of measuring inclinations of up to ±30° with a very high levels of precision. The natural damping of the liquids makes these inclinometers stable as well as precise.