Mixing chambers
For creating homogeneous gas mixtures

Creating homogeneous gas mixtures is not just a matter of putting the controlled flows of two or more gas streams together; for instance, if you need to dilute 1 mln/min of dopant with 10 ln/min of dilution gas you cannot expect to obtain a homogeneous mixture unless an appropriate mixing chamber is used. Bronkhorst have developed a series of special mixing chambers for such purposes. Please contact your local distributor to discuss the options for your application.