There is an increasing need for special gas mixtures. Moreover, very
often varying concentrations are required. Bronkhorst High-Tech have gained
much experience in supplying Mass Flow Controllers for such applications.
Creating homogeneous gas mixtures is not just a matter of putting the controlled
flows of two or more gas streams together; for instance, if you need to
dilute 1 mln/min of dopant with 10 ln/min of dilution gas you cannot expect
to obtain a homogeneous mixture unless an appropriate mixing chamber is
used. Bronkhorst High-Tech have developed a series of special mixing chambers
for such purposes. Please contact your local distributor to discuss the
options for your application.