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White Light Interferometric Microscope System

Accurate sub-nano-surface profiler with non-contact measurement Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefits Superior measurement performance Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process. […]

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Accurate sub-nano-surface profiler with non-contact measurement

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

Key benefits

Superior measurement performance

  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
  • Enables measurements with the same height resolution in a wide range of magnifications.
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
  • Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

  • The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible.
High Speed Model
BW-D501 BW-D502 BW-D503 BW-D505 BW-D506 BW-D507
Measurement optical system Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm) 1 pm (0.001 nm)
Step height measurement reproducibility σ: 8nm / 8μm step height measurement
Number of pixels 510x510
Height measurement time 4 s / 10 μm scan
Height measurement range < 90 μm < 20 mm < 90 μm < 20 mm
Measurement field size < 2015 x 2015 μm *
Piezo actuator Objective lens driven Nosepiece driven
Z axis Manual Electric Manual Electric
XY axis Manual Electric Manual Electric
Software Bridgelements® software modules



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