Accurate sub-nano-surface profiler with non-contact measurement Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefits Superior measurement performance Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process. […]
Wide range of observation methods
High Pixel Resolution Model | ||||||
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BW-S501 | BW-S502 | BW-S503 | BW-S505 | BW-S506 | BW-S507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
Number of pixels | 2046 x 2046, 1022 x 1022 (selectable via software) | |||||
Height measurement time | 38 s, 16 s / 10 μm scan | |||||
Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
Measurement field size (using 2.5X) | < 4448 x 4448 μm* | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |