White Light Interferometric Microscope System

Accurate sub-nano-surface profiler with non-contact measurement Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefits Superior measurement performance Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process. […]

SKU : I-C93-BW-D50x
Manufacturer: Nikon Metrology

Accurate sub-nano-surface profiler with non-contact measurement

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

Key benefits

Superior measurement performance

Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
Enables measurements with the same height resolution in a wide range of magnifications.
Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible.

High Speed Model
BW-D501	BW-D502	BW-D503	BW-D505	BW-D506	BW-D507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1 pm (0.001 nm)
Step height measurement reproducibility	σ: 8nm / 8μm step height measurement
Number of pixels	510x510
Height measurement time	4 s / 10 μm scan
Height measurement range	< 90 μm	< 20 mm		< 90 μm	< 20 mm
Measurement field size	< 2015 x 2015 μm *
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements® software modules